Study of aluminum-doped zinc oxide thin films by atomic layer deposition
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 102 === This work characterizes the mechanical and opto-electrical properties of aluminum doped Zinc Oxide (AZO) thin films on flexible PET substrates deposited by atomic layer deposition (ALD). The Aluminum composition of the AZO films was 2% by controlling the ra...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/70709030423693686863 |