The Control of Nano-Positioning Stage and Reliability Test
碩士 === 國立虎尾科技大學 === 自動化工程研究所 === 102 === This thesis uses a anti-integral PID controller to control a nano-positioning stage and conducts a reliability test of it. This study is divided into two parts. The PID controller to control the linear motor stage and piezo stage is ompared with an sliding mo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78k998 |