A Study on Mechanical Flexibility of Silicon Oxynitride and Organic/inorganic Multilayered Barrier Structures Deposited on Flexible Plastic Substrates
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === In this study, tetramethyl silane (tetramethysilane; TMS), ammonia gas is mixed with oxygen and other sources of gas, electricity pulp interest enhanced chemical vapor deposition system (Plasma-enhanced chemical vapor deposition; PECVD), in the flexible pla...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59du8h |