Study on Nano-Imprinting Guided Mode Resonance Sensor
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === This paper proposes a Nano-imprinting guided mode resonance (GMR) sensor by a heterodyne interferometer. The manufacturing process utilizes soft lithography, Nano-imprinting technology, and a thermo compressor to imprint the grating. First, Polydimethylsilo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/qer7he |