Small Displacement Measurement Based on SPR Heterodyne Interferometry with Angle Deviation Amplifier
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 102 === In this paper, a combination of an angular amplifier, a surface plasmon resonance(SPR) sensor and the common-path heterodyne interferometry is used to measure small displacements in real-time. Two mirror face to face and nearly parallel is used to be an ang...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/y7fj79 |