Analysis and Test of Different Types of Folded-Beam Suspension

• Main Authors: Wu,Ping-Hsuan, 吳秉軒
• Other Authors: Yu-Lin Peng
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/31825054176525218783

碩士 === 國立聯合大學 === 機械工程學系碩士班 === 102 === In this paper, we used traditional methods to make a ‘larger version’ of MEMS structures, i.e. the folded-beam suspensions. Eight different types of folded-beam suspensions were analyzed and tested. Using COMSOL software, simulation analysis confirmed that the theory can apply to the structures in different scales. Using an electric stage and a micro-pulling force testing machine, the displacement / rotation and the force / torque can be measured. Experimental results further proved that the use of non-MEMS processing methods can be used to perform the analysis to study the mechanical properties of small structures. Comparing to MEMS manufacturing processes, this study can significantly reduce the time and cost for production of specimen. Using the method proposed in this study, we demonstrated that the nested folded-beam suspension can lower the radial stiffness. It was beneficial to the design to achieve a large displacement of the actuator.