Analysis and Test of Different Types of Folded-Beam Suspension
碩士 === 國立聯合大學 === 機械工程學系碩士班 === 102 === In this paper, we used traditional methods to make a ‘larger version’ of MEMS structures, i.e. the folded-beam suspensions. Eight different types of folded-beam suspensions were analyzed and tested. Using COMSOL software, simulation analysis confirmed that the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31825054176525218783 |