Reasearch and Validation of Application of Adaptive Template Building Technology to Lithography Pattern of Light Emitting Diode Chip
碩士 === 國立臺灣科技大學 === 材料科學與工程系 === 102 === This resaearch builds the adaptive template for the surface lithography pattern of light emitting diode (LED) chip and tests the pattern accuracy. Firstly, a rapid screen process for chip integrity is used in this resaearch, the chip integrity is judged by gr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19748734287292010254 |