Uniaxial Straightness Error Compensation by Integrating Heterodyne Grating Interferometer and Precision Positioning Stage
碩士 === 國立臺灣科技大學 === 機械工程系 === 102 === This thesis focused on investigation of the horizontal straightness error measurement and compensation in a precision positioning system. The research presented a high-precision dual-stage positioning system combining an optical displacement measurement device,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58978572659410419069 |