Formation of Single Crystal Silicon Nanowire by Anodic Oxidation and Electrical Characterization of Non-planar substrate MOS Capacitors for Photo-detector Application
博士 === 國立臺灣大學 === 電子工程學研究所 === 102 === We demonstrated the self-aligned double layers single crystal silicon nanowires in silicon substrate by the control of the electric field effect of anodic oxidation. The wire pattern was defined by E-beam lithography and was etched by reactive ion etching. The...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/82514318297364765807 |