Investigation of Mechanical and Anti-corrosive Properties of Amorphous Titanium Oxycarbide Interlayer Coated between the Fluorinated Diamond-like Carbon Films and Ti6Al4V Substrates by RF-Plasma Enhanced Chemical Vapor Deposition
碩士 === 國立臺灣海洋大學 === 機械與機電工程學系 === 102 === Amorphous titanium oxycarbide (a-TiCxOy) interlayers were deposited between the fluorinated diamond-like carbon (F-DLC) films and Ti6Al4V substrates by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) technique. The objective is to improv...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75870309152689644163 |