The Study of Boron Pre-dep Process Improved by Low-pressure Chemical Vapor Deposition Technology
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 102 === Current low concentration (440 ohm/sq) boron pre-deposition processes can not achieve good uniformity performance, results in poor reproducibility and cause to additional processes &; production cycle time. This paper investigates a strategy to reduce non-u...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28839318708398702378 |