Oxidation Resistance and Mechanical Properties of CrTaSiN Coatings Prepared Using Co-sputter Deposition
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 102 === CrTaSiN coatings were prepared using reactive magnetron co-sputtering on silicon wafers and cobalt-cemented tungsten carbide substrates to evaluate its feasibility for protective purpose on glass molding dies. The nitrogen gas flow...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/49593227618904098237 |