Characterization and sensor device application of ZnCr2O4 semiconductor thin film and nanostructure
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 102 === Two dimensional ZnCr2O4 (ZCO) thin films and ZCO in three-dimensional architectures with various crystalline qualities were prepared in Ar and Ar/O2 mixed ambient by rf sputtering. The structural analyses reveal that the film has a poor crystalline quality gro...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24byrs |
| Summary: | 碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 102 === Two dimensional ZnCr2O4 (ZCO) thin films and ZCO in three-dimensional architectures with various crystalline qualities were prepared in Ar and Ar/O2 mixed ambient by rf sputtering. The structural analyses reveal that the film has a poor crystalline quality grown in Ar ambient; moreover, the crystalline quality of the ZCO thin film was markedly enhanced with oxygen supply during thin-film deposition. The ZCO thin films prepared in pure Ar ambient exhibited a surface with small spherical grains and densely compacted with each other. However, a distinct columnar texture and relatively large grains in sharp angular appearance were observed for the film prepared in Ar/O2 mixed ambient. X-ray photoelectron spectroscopy and photoluminescence analyses reveal that ZCO film prepared in Ar ambient exhibited more randomly atomic arrangement in the film. The ZCO films were further deposited onto the ZnO nanostructures to form a three-dimensional architecture. The ethanol and acetone gases sensing measurements displayed that the ZnO-ZCO core-shell nanostructures with the ZCO prepared in Ar ambient exhibited superior selectivity to ethanol and acetone gases. The gas sensing performance of the ZnO-ZCO nanostructures with various crystalline qualities of ZCO shell layer was correlated with the structural differences of the ZCO shell layer prepared with and without oxygen addition in the sputtering gas.
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