Characterization and sensor device application of ZnCr2O4 semiconductor thin film and nanostructure
碩士 === 國立臺灣海洋大學 === 材料工程研究所 === 102 === Two dimensional ZnCr2O4 (ZCO) thin films and ZCO in three-dimensional architectures with various crystalline qualities were prepared in Ar and Ar/O2 mixed ambient by rf sputtering. The structural analyses reveal that the film has a poor crystalline quality gro...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/24byrs |