Inverse Bouc-Wen model Roubst loop-shaping control for a nano-positioning stage
碩士 === 國立臺灣師範大學 === 機電科技學系 === 102 === This thesis is dedicated in hysteresis effect’s compensation and loop-shaping robust controller design of one axis piezoelectric stage, evading its nonlinear hysteresis, and achieves precise positioning. As semiconductor technology advances, the demand for the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03028547403935805822 |