| Summary: | 碩士 === 國立臺灣師範大學 === 機電科技學系 === 102 === This thesis is dedicated in hysteresis effect’s compensation and loop-shaping robust controller design of one axis piezoelectric stage, evading its nonlinear hysteresis, and achieves precise positioning.
As semiconductor technology advances, the demand for the accuracy of positioning systems also increases. Traditional mechanical transmission systems may not be able to satisfy these demands. Piezoelectric actuators are characterized by high resolution, high accuracy, and large driving force; hence, they are applicable in position control platforms. In this following work, the Bouc-Wen model is adopted to establish a model piezoelectric-nonlinear system, and an inverse Bouc-Wen model, employed to designed to compensate the piezoelectric-nonlinear system, renders the piezoelectric system linear. The result indicates that the method of loop-shaping robust controller for the piezoelectric platform and the compensating technique by the inverse Bouc-Wen model can eliminate nonlinearity effectively, and achieve precise positioning.
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