Study of Novel Gate-All-Around Junctionless FinFET SONOS Nonvolatile Memory with Silicon Nanocrystals

碩士 === 國立清華大學 === 工程與系統科學系 === 102 === In this study, we demonstrated the Gate-All-Around Junctionless FinFET SOncOS Nonvolatile Memory with Silicon Nanocrystals to improve the memory window and reliability. Moreover, the Si-NCs has the simple process and compatible with current Flash memory process...

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Bibliographic Details
Main Authors: Chung, Ming-Hsien, 鍾明憲
Other Authors: Wu, Yung-Chun
Format: Others
Language:en_US
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/40551686515798008428