Study of Novel Gate-All-Around Junctionless FinFET SONOS Nonvolatile Memory with Silicon Nanocrystals
碩士 === 國立清華大學 === 工程與系統科學系 === 102 === In this study, we demonstrated the Gate-All-Around Junctionless FinFET SOncOS Nonvolatile Memory with Silicon Nanocrystals to improve the memory window and reliability. Moreover, the Si-NCs has the simple process and compatible with current Flash memory process...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/40551686515798008428 |