Development of Novel Implant Masking Processes for Double Self-Aligned 4H-SiC DMOSFETs
碩士 === 國立清華大學 === 電子工程研究所 === 102 === 因申請專利緣故，資料延後公開
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61123879564193766458 |