A Quality Engineering Research Framework for Advanced Process Control in Semiconductor Manufacturing and Empirical Studies
博士 === 國立清華大學 === 工業工程與工程管理學系 === 102 === As the global competition in semiconductor industry becomes fiercer, yield enhancement, the basis of quality, is the key factor to maintain competitive advantages for semiconductor companies. With the shrinking feature size in advanced semiconductor technolo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46308210996795722392 |