The dual-mode SAW device using IDT/ZnO/AlN/Si3N4/Si structure
碩士 === 國立中山大學 === 電機工程學系研究所 === 102 === In this study, dual-mode (Rayleigh-mode and Sezawa-mode) surface acoustic wave (SAW) devices using IDT/ZnO/AlN/Si3N4/Si structure were fabricated. To fabricate dual-mode SAW Devices, the RF magnetron sputtering method for the growth of piezoelectric thin films...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7nff93 |