The preparation and optical properties of Si-Al thin films and their applications on the passivation of thin film transistors
博士 === 國立中山大學 === 材料與光電科學學系研究所 === 102 === The present paper discusses the application of the silicon-aluminum and its chemical compound thin film applied on non conductive vacuum metallization (NCVM) and passivation layer of the a-IGZO thin-film transistors (a-IGZO TFTs). The first part of the pape...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5vw53e |