Novel Nonlinear Waveguide Material Tantalum Pentoxide &; MicroRing Fabrication

• Main Authors: Bo-Tsang Chen, 陳柏蒼
• Other Authors: Chao-Kuei Lee
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/fwfsvt

碩士 === 國立中山大學 === 光電工程學系研究所 === 102 === In this work, high optical properties were grown by non-toxic magnetron sputter system, using XRD measurements and Micro-Raman spectrum, the crtstalline state of Ta2O5 were confirmed. The refractive index of the Ta2O5 thin film was around 2.1~2.08 and the extinction coefficient is extremely low. The optimized surface roughness as low as 0.12nm was obtained as annealing with three hours at temperature of 650C, and the profile of cross section is extremely dense with no pinhole observed. We further estimated the crack density by using 30k X SEM image and no cracks were found. The n2 value of the thin film is as high as 3.5×10-12 cm2/W, Ta2O5 provide an novel option for FWM-OPO. In our calculation, we estimated the dispersion contribution from bulk material and waveguide. By verified the past work by other team data to confirm the correctness of our motheds.We also calculate in our Ta2O5 case and obtained the dispersion curve. In the fabrication process, we haven’t obtained the best quality of Micro-Ring structure.As the result, the hint were proposed to optimize the quality of our devices.