Novel Nonlinear Waveguide Material Tantalum Pentoxide &; MicroRing Fabrication
碩士 === 國立中山大學 === 光電工程學系研究所 === 102 === In this work, high optical properties were grown by non-toxic magnetron sputter system, using XRD measurements and Micro-Raman spectrum, the crtstalline state of Ta2O5 were confirmed. The refractive index of the Ta2O5 thin film was around 2.1~2.08 and the exti...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/fwfsvt |