Novel Nonlinear Waveguide Material Tantalum Pentoxide &; MicroRing Fabrication

碩士 === 國立中山大學 === 光電工程學系研究所 === 102 === In this work, high optical properties were grown by non-toxic magnetron sputter system, using XRD measurements and Micro-Raman spectrum, the crtstalline state of Ta2O5 were confirmed. The refractive index of the Ta2O5 thin film was around 2.1~2.08 and the exti...

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Bibliographic Details
Main Authors: Bo-Tsang Chen, 陳柏蒼
Other Authors: Chao-Kuei Lee
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/fwfsvt