A optimization study of SiNx film thickness and uniformity for TFT-LCD isolation gate by Taguchi Method
碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 102 === Time of high-pixel , high-resolution of large-size LCD panel is coming . LCD process technology requires constant innovation , in order to achieve large output , low cost and product quality optimization . Taguchi method has been extensively improves the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42740817691997066339 |