Study of Relative Humidity Sensing Device Using Zinc Oxide Compound with Aluminum Doping
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 102 === In this thesis, the two terminal sensing devices and three terminal sensing devices were successfully fabricated by using the DC sputtering method and photo lithography method. The sensing devices are to detect the relative humidity value in the moisture en...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/679y23 |