Development of angular displacement measurement and positioning by birefringence heterodyne interferometry
碩士 === 國立中央大學 === 光機電工程研究所 === 102 === The birefringence heterodyne interferometry for the angular measurement and position is presented. The advantage of the instrument is the large measurement range and high resolution. When p- and s-polarized beams pass through a birefringence crystal, the phase...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22696969596034398428 |