The Research of Collimated Exposure Machine

碩士 === 國立中央大學 === 光電科學與工程學系 === 102 === In this study, we present a research and development of a collimated exposure machine. The introduction of concept of development, the simulation of the optical system and the assembly of the optical components. The study of collimated exposure machine use xen...

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Bibliographic Details
Main Authors: Yen-An Chen, 陳彥安
Other Authors: Rong-Seng Chang
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/66csqj