none
碩士 === 國立中央大學 === 機械工程學系 === 102 === In this paper, we designed a 2-axis capacitive accelerometer using TSMC 0.35μm 2P4M process and post-process provided by CIC. With standard CMOS process, the reliability of the MEMS device can be increased effectively. The development of MEMS had been strongly in...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/mrdzx2 |