The effect on Polycrystalline Silicon Surface Roughness by Electrical Chemical Machining Grinding Using Graphene Oxide Suspension
碩士 === 國立中央大學 === 機械工程學系在職專班 === 102 === There are some conclusions gotten from the experiment. The surface roughness and average friction coefficient are 0.092μm and 0.33μ by traditional mechanical grinding process; the surface roughness and average friction coefficient are 0.051μm and 0.10μ by add...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56961985890911503960 |