Numerical simulation of flow, thermal and oxygen distributions for a Czochralski silicon growth with in a transverse magnetic field
碩士 === 國立中央大學 === 機械工程學系 === 102 === A three-dimensional numerical simulation has been performed to understand the motion of the melt flow, thermal field and oxygen distributions during the Czochralski silicon single crystal growth process under the influence of a transverse magnetic field. With the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26192033905626159946 |