Light-Passivation Effect on P-type Porous Formation
碩士 === 國立中央大學 === 機械工程學系 === 102 === Porous silicon was discovered in 1956, Uhlir accidentally discovered a black film layer on the wafer in electrochemical polishing on silicon wafers.The film is called porous silicon. After the decades,the researches on porous silicon increase widespreadly on...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49653470426639782507 |