Analysis of uniform temperature distribution in MOCVD susceptor by high frequency RF induction heater
碩士 === 國立中央大學 === 能源工程研究所 === 102 === This study uses the numerical analysis to simulate the high frequency RF induction heating for MOCVD susceptor, the phenomenon of electromagnetic induction heating and distribution of temperature on the susceptor are investigated. Using numerical analysis calcul...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97286261120149038744 |