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碩士 === 國立中央大學 === 化學工程與材料工程學系 === 102 === In this study, we demonstrated that large-area arrays of vertically aligned Si nanowires were successfully fabricated on (001)Si and (111)Si substrates by using the PS nanosphere lithography combined with the Au-assisted selective chemical etching process. T...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ps74ue |