Study of microvias fabrication on AlN substrates by using a femtosecond laser
碩士 === 國立交通大學 === 電子物理系所 === 102 === The ceramics with high thermal conductivity and high electrical resistivity are ideal interposer materials for three-dimensional integrated circuits. However, the current etching process utilized in the semiconductor industry for fabricating through silicon via c...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/8n6dx7 |