Fabrication of C-axis Oriented AlN Thin Film by Pulsed-DC Sputtering
碩士 === 國立暨南國際大學 === 電機工程學系 === 103 === This thesis was to investigate the fabrication of c-axis AlN thin film by pulsed-DC sputtering on the poly AlN substrate. The flattening layers to smoothen the surface of the AlN substrate were spun on the AlN substrate before following sputtering processes. The...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87097143787043683627 |