Performance Investigation of VOx Doped Tantalum in Microbolometers
碩士 === 國立成功大學 === 光電科學與工程學系 === 102 === In this study, the tantalum (Ta) was used to dope into the VOx films. The VOx films with various Ta-doped contents were fabricated by magnetron radio frequency (RF) co-sputtering system. The TCR values of Ta-V-O thin films were obtained by four point probe mea...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15265069095863481561 |