Characteristics and device applications of Ga-doped ZnO transparent conductive layers grown by MOCVD
碩士 === 國立成功大學 === 光電科學與工程學系 === 102 === In this study, high performance of Ga-doped ZnO (GZO) films have been prepared on sapphire substrates by the metal-organic chemical deposition (MOCVD). We focus on the optimization of the electrical and optical properties of GZO films by varying TMGa flow rate...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49739860798909994595 |