Excimer Laser Micromachining of Three-Dimensional (3D) Microstructures Based on Hole Area Modulation and Optical Diffraction Principle
碩士 === 國立成功大學 === 機械工程學系 === 102 === The purpose of this thesis is to use an excimer laser micromachining system to fabricate 3D microstructures with quite arbitrary profiles. The key point of this method depends on the optical diffraction phenomenon when applying a Hole Area Modulation (HAM) method...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/93972718672281715090 |