Microwave Plasma Chemical Vapor Deposition of Diamond/AlN Films for MEMS Resonators
碩士 === 國立成功大學 === 微電子工程研究所 === 102 === In this thesis, the MEMS resonators of aluminum nitride (AlN) piezoelectric cantilever beams have been successfully demonstrated and fabricated with diamond films which are deposited by microwave plasma chemical vapor deposition system (MPCVD). With the chemic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3eys6u |