A study of forming CuAlO2 thin film and its application to UV detector
碩士 === 國立成功大學 === 微電子工程研究所 === 102 === In this study, I investigated methods to form CuAlO2 film using Al2O3 substrate, and its application to UV detector. I sputtered a Cu film on Al2O3 substrate followed by electrochemical plating(ECP) Cu2O film on the Cu coated Al2O3 substrate. A CuAlO2 film can...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25380279107937526930 |