Diamond-like Carbon Films Deposited by Plasma-assisted Chemical Vapor Deposition
碩士 === 國立成功大學 === 化學工程學系 === 102 === The C60 incorporated diamond-like carbon films with low wear as well as high hardness were deposited on high temperature Si(100) substrate by RF-plasma-assisted chemical vapor deposition under different C60 content in acetylene. The lowest wear rate was achieved...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s9nz9t |