Amorphous Indium-Gallium-Zinc Oxide Film Ozone Gas Sensor
碩士 === 國立中興大學 === 奈米科學研究所 === 102 === In the experiment, indium gallium zinc oxide (IGZO) film was used for the ozone gas sensor. Because the adsorption and desorption of ozone can cause variation of the electrical properties of IGZO film,we discussed the relation between IGZO electrical properti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13292307187691409537 |