The study of internal friction and energy loss in nanocrystalline Cu thin film
碩士 === 國立中興大學 === 精密工程學系所 === 102 === In this study, we use the MEMS process to produce the specimens with silicon substrate, and use this specimens to carry the copper thin film. Combining the capacitance measurement method and vaccum system to advance the dynamic measurement experiment, and studyi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41218682983782618527 |