Time and Temperature Dependence of Viscoelastic Stress Relaxation in Al and Al Alloy Thin Films
碩士 === 國立中興大學 === 精密工程學系所 === 102 === Metal thin films are using as capacitance switches in microelectromechanical systems (MEMS). Problems with long-term reliability, however, set limits on the lifetimes of MEMS capacitance switch applications. The better the thin films can resist relaxation, the l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70756829735191324829 |