Effect of Temperature on Energy Loss and Internal Friction in Nanocrystalline Metal Thin Films
博士 === 國立中興大學 === 精密工程學系所 === 102 === This study employed a temperature controlled capacitance-based system to measure the mechanical behaviors associated with temperature dependent energy loss in ultra-thin copper (Cu) films. Thin Cu films are widely used in electronic interconnections and micro-el...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09819883474991252647 |