Deposited a-Si:H solar cells by modulation initial gas flow of i-layer

碩士 === 國立中興大學 === 電機工程學系所 === 102 === Optimization the quality of i-layer can improve the optical, structural and electrical properties of a-Si:H p-i-n solar cell. In this thesis, a-Si:H thin-film solar cells were fabricated using 13.56 MHz plasma enhanced chemical vapor deposition (PECVD) te...

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Bibliographic Details
Main Authors: Chia-Hung Chang, 張家鴻
Other Authors: 江雨龍
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/09720761643807837795