Deposited a-Si:H solar cells by modulation initial gas flow of i-layer
碩士 === 國立中興大學 === 電機工程學系所 === 102 === Optimization the quality of i-layer can improve the optical, structural and electrical properties of a-Si:H p-i-n solar cell. In this thesis, a-Si:H thin-film solar cells were fabricated using 13.56 MHz plasma enhanced chemical vapor deposition (PECVD) te...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/09720761643807837795 |