Spray coating of anti-reflection thin film

• Main Authors: Chia-Chiao Hsieh, 謝佳樵
• Other Authors: Gou-Jen Wang
• Format: Others
• Language: zh-TW
• Published: 2014
• Online Access: http://ndltd.ncl.edu.tw/handle/94871086056139297396

碩士 === 國立中興大學 === 機械工程學系所 === 102 === In this study, spray coating was implemented for the deposition of organic/inorganic hybrid anti-reflection (AR) thin film. Compared with the conventional physical vapor deposition (PVD) process, spray coating possesses advantages such as spraying coating of a single layer of low refractive (LR) material is enough to provide effective anti-reflection, AR films with various sizes can be fabricated, the cycle time is relative short, the cost is low, deposition on chip and mother glass can be conducted, and the expensive umbrella-shaped fixture is not required. The low cost wet-spray process was implemented in this study. The optimal thickness of the deposited film having the best transmittance was measured to be 100.02 nm. This optimal film had an average water contact angle (WCA) of 92°−95°, which is within the scope of the standard. It was also observed that the spray coated AR thin films possessed better wear resistance than that deposited by the PVD process. The optical characteristic of the spray coated AR films was characterized by the spectroscopic ellipsometer and the haze meter, while the physical characteristic was measured using the pencil hardness tester and the cross-cut test, the chemical resistance was investigated by the sweat test and the rganic solvent soak test, and the anti-smudge property was characterized using the permanent marker and the finger printing.