Spray coating of anti-reflection thin film
碩士 === 國立中興大學 === 機械工程學系所 === 102 === In this study, spray coating was implemented for the deposition of organic/inorganic hybrid anti-reflection (AR) thin film. Compared with the conventional physical vapor deposition (PVD) process, spray coating possesses advantages such as spraying coating of a s...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2014
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Online Access: | http://ndltd.ncl.edu.tw/handle/94871086056139297396 |