Spray coating of anti-reflection thin film

碩士 === 國立中興大學 === 機械工程學系所 === 102 === In this study, spray coating was implemented for the deposition of organic/inorganic hybrid anti-reflection (AR) thin film. Compared with the conventional physical vapor deposition (PVD) process, spray coating possesses advantages such as spraying coating of a s...

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Bibliographic Details
Main Authors: Chia-Chiao Hsieh, 謝佳樵
Other Authors: Gou-Jen Wang
Format: Others
Language:zh-TW
Published: 2014
Online Access:http://ndltd.ncl.edu.tw/handle/94871086056139297396