Lift-off process for GaN-based light emitting diode membranes
碩士 === 國立中興大學 === 材料科學與工程學系所 === 102 === In this thesis, GaN-based nano-membranes light emitting diode (NM-LED) structures had been fabricated through a laser scribing process and an electrochemical wet etching process. A heavily Si-doped GaN:Si layer as a sacrificial layer was grown below the InGaN...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/rg2arv |